Spectroscopy ellipsometry for complex materials

Spectroscopy ellipsometry for complex materials

Description of the activity

Spectroscopic ellipsometry is an optical technique to characterize thin films, surfaces and nanostructures. It is based on the analysis of phase and amplitude variations of a polarized light beam, due to reflection or transmission. In fact, the interaction of light with matter changes the polarization state of light which, if initially linear, is generally elliptically polarized after interaction with the sample.
Thanks to the analysis of the behavior of light at the interface between two materials, it is possible to obtain experimental data such as the dielectric function values, the sample thickness, and the material structure.
The research activity is focused on the study of nanostructured materials for photonics and sensors, on the study of innovative technologies, such as photonic crystals, electromagnetic metamaterials, organic and hybrid materials, and strongly correlated electronic systems.
Our laboratory is equipped with the most common optical characterization instruments. In particular, a VASE® variable angle spectroscopic ellipsometer is available, operating from the visible to the near infrared, which allows the characterization of various materials, such as semiconductors, dielectrics, polymers, metals, multilayers, etc. The instrument is also implemented with a system for carrying out measurements in guided light, and a second for controlling the temperature of the material.

Involved personnel

A. Marino

National and International Collaborations

  • National Research Council – CNR (IMM – Institute for Microelectronics and Microsystems, SPIN – Superconductors, Innovative Materials and Devices Institute, ISMN – Institute for the Study of Nanostructured Materials)
  • University of Naples Federico II (Physics Department)
  • National Institute of Nuclear Physics
  • Polytechnic University of Madrid, Spain


  • VASE® Ellipsometer by J. A. Woollam